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· 제품명 :
주사 전자 현미경 EM-30AX Plus (Scanning Electron Microscopy)
· 특징 :
* SEM-EDS 일체형 모델
* 사용하기 쉬운 인터페이스
* 완벽한 수준의 오토기능
- 샘플 스테이지 Full Auto 사용
- 높은 수준의 Auto Focus / Contarst / Brightness / Gun Alignment 기능 제공
* 최대 넓이 60mm, 높이 45mm 의 시료 측정이 가능한 큰 챔버
* 최대 x150,000 배까지 촬영 가능
* 'Navigation Mode' 로 더욱 쉬워진 시료 관찰
* 'Driving Mode'에서 조이스틱을 이용한 정밀한 컨트롤 가능
* BSE detector 와 LV mode(옵션)을 이용한 시료 관찰 가능
[제품설명]

Scanning Electron Microscopy
 

TABLE TOP SEM EM SERIES

ADVANCED SEM-EDS TOTAL SOLUTION EM-30AX PLUS

 

 
Specification
Magnification x20 ~ x150,000 (Effective :~ x80,000)
Accelerating Voltage 1kV to 30kV
Electron Gun Tungsten Filament(w)
Detector SE Detector, BSE Detector, EDS
Stage X: 35mm (Motorized),Y: 35mm (Motorized)
T: 0 to 45° (Motorized),R: 360° ,Z: 5 to 50mm(Manual) 
Maximum Sample Size  45mm (H),60mm (Diameter)
Image Mode(pixel) · RDE (320x240), TV (640x480), Slow (800x600)
· Photo (1280x960, 2560x1920, 5120x3840) 
Frame Rate · RDE (MAX. 30 frames/sec)
· TV (MAX. 10 frames/sec)
· Slow (MAX. 2 frames/sec) 
Vacuum System Turbo Molecular Pump (Less than 3min)
Auto Functions Auto Focus, Contrast, Brightness, Filament, Start
OS · Windows7
Operation Keyboard/Mouse/Joystick
Special Features · Navigation View
· Special Multi Sample Holder
· Signal Mixing (SE+BSE)Dual Display(SE/BSE)
· Integrated BSE(Compo, Topo)
· Line Profile
· Image Process
· Measurement Tool
· Remote Control 
Options Low Vacuum, Cool Stage
Dimension 400 (W) x 600(L) x 550 (H)mm,95kg
 
 
 
EDS  Specification
System  Resolution Mn K 133eV standard 129 eV premium
Chip Size 30 mm²
Window Si3N4 <100 nm thick
Cooling System Peltier
Detection Range Be to Am

X-ray Input 1 Mcps/channel
Throughput (Stored Counts) 300 kcps/channel
Peak To Background 10,000 : 1
Resolution Stability 90% up to 200 kcps
eV/Channel 10 eV/ch
Power Requirements · 5 W max - detector only 
· 10 W max - with DPP box
Input Voltage · 100 - 240 VAC.
· 47 - 63 Hz
Operating Conditions · 5° to 50° C; Altitude up to · 4000m · 20-80% RH non-condensing
S/W Functions Point&ID, Line Scan, Mapping